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model:PT-1200C-R-PECVD

Plasma enhanced rotational PECVD system

Application

Detailed Parameters Of The Product

Main features:
　　The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .　
　　Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
　　Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.

Technical Parameters

Furnace
Max. Tem	1200℃
Heating zone length	440mm Customizable
Constant zone length	200mm Customizable
Temperature Controller	lPID automatic control and auto-tune function. l30 programmable segments for precise thermal processing. lBuilt-in protection for the over-heated and broken thermocouple. lOperation interface is 7 "industrial control computer
Heating Elements	·Resistance wire, Fe-Cr-Al Alloy doped by Mo
Temperature Accuracy	+/- 1℃
Processing tube	Size：Φ60420+Φ100360+Φ60*420mm Furnace tube rotation rate：3~13r/min Customizable
Furnace body inclination angle	0~35°（adjustable）
RF generator
Signal frequency	13.56 MHz±0.005%
Power output range	0-500W
RF output interface	50 Ω, N-type, female
Power stability	≤5W
Gas supply system
High precision mass Flowmeter（Range optional）
Accuracy	±1.5%
Response accuracy	±0.2%
Response time间	Gas characteristics：1～4sec Electrical characteristics:10sec
Working pressure difference range	0.1～0.5MPa
Max. pressure	3MPa
Connection	Φ6mmDouble clasp stainless steel joint
Vacuum unit
KF25 series bellows and manual stopper valves
Vacuum up to10-1Pa
The value can be displayed intuitively by the digital display vacuum tester

Pre:Small rotary type PECVD Furnace
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Contact

No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司

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