model:PT-1200C-S-SL-PECVD
PECVD system with small sliding tube furnace
Application: Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
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Detailed Parameters Of The Product
This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere FurnacWfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 1.heating system
| max. temp. |
1200℃ |
| working temp. |
≤1100℃ |
| tube size |
Φ50mm Customizable |
| insulation material |
Alumina fiber |
| thermocouple |
N type |
| temp. accuracy |
±1℃ |
| temp. control |
l PID automatic control and auto-tune function.WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac l 30 programmable segments for precise thermal processing.WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac l Built-in protection for the over-heated and broken thermocouple. |
| heating zone length |
230mm Customizable |
| constant zone length |
100mm Customizable |
| heating element |
Resistance wire, Fe-Cr-Al Alloy doped by Mo |
WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac2、RF generator
| Output power |
0W~150W |
| RF output port |
50 Ω, N-type, female |
| Power stability |
≤5W |
| Harmonic component |
≤-50dbc |
| Overall efficiency |
>=70% |
| Power factor |
>=90% |
| Cooling |
air cooling |
WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac3、Gas supply system
| connnector |
double cover stainless steel fitting |
| standard range(N2) |
50sccm,100sccm、500sccmWfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (optional) |
| Accuracy |
±1.5%F.S |
| liner |
±1%F.S |
| Max. pressure |
3MPa |
WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac4、vacuum unit
| Rotate rate |
1450rpm |
| Pumping rate |
10m³/h |
| ultimate vacuum |
5X10-1Pa |
| Oil Capacity |
WfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 1.1LWfmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |