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model:PT-O1200-4CPECVD

Large diameter pecvd system

Application

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Detailed Parameters Of The Product

Brief Intrudction:
This equipment is mainly used for lab scale graphene growth and preparation, and it can be used for the growth of carbon nanotubes. High-quality transparent conductive film can be prepared for use in mobile phone touch screens, tablet computers, smart wearables, sensors and other fields.

Technical Specification:

Model	PT-O1200-4CPECVD
Display	LED
Max. Temperature	1200℃
Continuous Woking Temp	≤1100℃
Heating Rate	0~20℃/min
Temperature Zone	Single
Accuracy	±1℃
Tube Size	Ø60*1250mm(OD×L)
Temperature Control	PID automatic control via SCR power control
Heating curves	30 steps programmable
Heating zone	440mm
constant heating zone	150mm
Power	220V, 50 Hz, single phase at max. 4KW
Output Power	5 -500W adjustable with ± 1% stability
RF frequency	13.56 MHz ±0.005% stability
Reflection Power	200W max.
Matching	Automatic
RF Output Port	50 Ω, N-type, female
Noise	<50 dB.
Cooling	Air cooling.
Power	220V, 50Hz
Anti-corrosive Pressure Gauge	3.8x10^-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent
Vacuum System	Rotary vane pump+diffusion pump, max vacuum rate 6.67*10pa
Mass Flow meters	Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Control range from 0~500 sccm One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually Gas inlet fitting: four 1/4NPS Gas outlet fitting: four 1/4NPS