Zhengzhou Protech
Zhengzhou Protech
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High vacuum PECVD system
model:PT-T1200

High vacuum PECVD system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Product Overview:
   PT high vacuum PECVD system is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.
SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Main features of high vacuum PECVD system :SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Technical Parameter:SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

product nameSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

High vacuum PECVD systemSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Slide rail tube furnace partSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Product numberSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-T1200SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube sizeSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Φ50mmX1600mmSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube materialSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Quartz tubeSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating zoneSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

300mmSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating temperatureSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1100°CSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum temperatureSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200°CSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control methodSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K-type thermocoupleSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

way to controlSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to useSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control accuracySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control protectionSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

With over-temperature and burnout protection functionSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating rateSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-20ºC/min, recommended 10ºC/minSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating elementSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Molybdenum resistance wireSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating VoltageSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AC 220V single-phase 50HZ (circuit voltage users can choose to customize)SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

heating powerSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3KWSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace materialSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Alumina polycrystalline fiberSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace structureSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace body has a slide rail, which can realize rapid heating and coolingSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flange jointSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installedSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Sealing systemSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

caseSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless steel housingSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OptionalSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Auxiliary cooling fanSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

                     Vacuum system partSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

nameSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum systemSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3paSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pneumatic system partSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

nameSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-way mass flow meterSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. MFC 1-MFC4: 0-1000sccm adjustableSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. A mixing tankSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Air inlet and outlet: 3 in and 1 outSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flow control: manual rotary adjustmentSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Connection mode: double card sleeve connectionSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Plasma power supply partSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

nameSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

500W plasma power supplySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power rangeSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-500W (continuously adjustable)SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

working frequencySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56MHZ+0.005%SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating modeSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous outputSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF output impedance interfaceSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N-type, female (50Ω)SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power stabilitySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤2WSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum reflected powerSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

70WSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power protection settingsSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DC over current protection, power amplifier over temperature protection, reflected power protectionSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Supply voltage/frequencySmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Single-phase AC (187V-253V) 50-60HZSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

cooling methodSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Wind coolingSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Overall sizeSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

88X483X550 MMSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Total WeightSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.5KGSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CertificationSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ISO certification, CE certificationSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

After-sales serviceSmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)SmVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PECVD system

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