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model:PT-T1200-S06LC-YR

Sliding PECVD Equipment

Application

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Detailed Parameters Of The Product

Product Usage：
This sliding PECVD system with preheating system is a new exploration tool for growing nanowires or using CVD methods to make various thin films.

Product Introduction：
The sliding PECVD system with a preheating system and it consists of a plasma frequency power supply, preheating furnace, sliding tube furnace, 4MFC and a vacuum system. Can be used to grow nano or CVD methods to make various thin films.

Specifications：

Part I: Sliding Tube Furnace
Model Name	PT-T1200-S06LC-YR
Tube Size	601600mm(ODLength) (Optional: Φ50，80，100，120，150mm)
Tube material	Quartz Tube
Hot Zone length	200*200mm
Working Temperature	1100℃
Max Temperature	1200℃
Temperature Control	Two zones independently control temperature, each zone has intelligent 30-segment PID programmable control, with over-temperature and thermo broken protection functions
Display	7”Touch Screen
Temperature Accuracy	±1℃
Heating Rate	0-10ºC/min
Heating Element	Electric Wire with mo
Power Supply	AC 220V Single phase 50/60HZ
Heating Power	3KW
Chamber Material	Alumina Fiber
Flange	Two sets of vacuum flanges are installed on two ends of the tube,One pressure gauge is installed on the end of gas inlet.
Sealing	The tube and flange adopt O-ring extrusion seal, which is convenient for disassembly and assembly, repeatable disassembly and assembly, and wihth great air tightness.
Pre-heating Furnace
Main Specification	Max temperature is 1100 degrees, and the temperature is controlled by multi-stage programs. The solid and liquid raw materials can be placed in the preheating furnace and mixed with the gas raw materials after gasification
Vacuum System
Main Specification	With rotary vane pump, can reach rough vacuum level
Gas System
Main Specification	4MFC（Gas type and flow rate is base on customer request）
RF Power
Output Power	0-500W adjustable with ± 1% stability
Warranty	One year warranty&lifetime technical support（not including the wear parts）
More pls contact us for customize