Zhengzhou Protech
Zhengzhou Protech
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PECVD Furnace System
model:PT-1200PECVD

PECVD Furnace System

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Description:qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PECVD furnace(Plasma Enhanced Chemical Vapor Deposition), which consists of 500W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Descriptions of PECVD furnace:      PCVED by microwave or radio frequency make gas ionization containing film the constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Split Tube furnace · Input power: 208 – 240V AC, 1.2kWqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1200°C Max. working temperature for < 60 minutesqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100°C Max for continuous heatingqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High purity quartz tube 2"OD x 1.7"ID x  39.4" Length qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 segments programmable precision digital temperature controllerqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 8" (200mm), single zone. 2.3" (60mm)  
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Generator
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Output Power:          5 -500W adjustable with ± 1% stabilityqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF frequency:          13.56 MHz ±0.005% stabilityqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Reflection Power:      200W max.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Matching:                 AutomaticqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF Output Port:        50 Ω, N-type, femaleqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Noise:                      <50 dB. qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Cooling:                    Air cooling. qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Power :                     208-240VAC, 50/60HzqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive Pressure Gauge
· 3.8x10-5 to 1125 Torr measurement rangeqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliableqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· atmospheric pressure detectionqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortensqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· process cycleqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click pic to view detal spec.
Mass Flow meters qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Four precision mass flow meters (0.02% accuracy)qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· with digital display are installed on the bottom case to control gasqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flow rate automatically.qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 1: Gas flow range from 0~100 sccmqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 2&3: Control range from 0~200 sccm  qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 4: Control range from 0~500 sccmqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One gas mixing tank is installed on bottom case with liquid release valveqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4 stainless steel needle valves is installed on left side of bottomqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
case to control 4type gases mixing manuallyqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas inlet fitting: four 1/4NPSqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas outlet fitting: four 1/4NPS 
Vacuum Pump  qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· AC 220V 50 Hz  1/2HP  375WqoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2 Liter /S  or 120 liter/m qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Oil trap (inlet) and exhaust filter (outlet) are installed.
Warranty  qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One year limited warranty with lift time support (Consumable parts such qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
as processing tubes, o-rings and heating elements are not covered qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
by the warranty, please order the eplacement at related products below.)qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 The furnace can be customized according to customers’ requirements.
qoeMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD Furnace System
PECVD furnace can be customized according to customers’requirements.

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