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Home > Products > Coating Equipment > Roll-to-roll graphene film growth equipment

model:PT-T1200RTR

Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment

Application

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Detailed Parameters Of The Product

Introdution
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.

1.heating system

max. temp	1200℃
working temp.	≤1100℃
tube size	Φ150mm
insulation material	Alumina, high temperature fiber products
thermocouple	K type
temp. accuracy	±1℃
temp. control	· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple.
Heating Zone Length	200+200+200mm
Heating Element	Fe-Cr-Al Alloy doped by Mo
power	single phase，220V，50Hz

2、RF generator

Power output	0W~1000W
Maximum reflected power	200W
RF output interface	50 Ω, N-type, female
Power stability	≤5W
Harmonic component	≤-50dbc
voltage	single phase （187V-253V） 50/60HZ
Machine efficiency	>=70%

cooling	air cooling

3、3 channels MFC

Connector style	Double cutting ferrule stainless steel connector
Standard range(N2)	200sccm，500sccm、1000sccm （optional）
Accuracy	±1.5%F.S
Linearity	±1%F.S
Repeat accuracy	±0.2%F.S
Response time	gas：1～4 Sec，electricity：10 Sec
Working pressure range	0.1～0.5 MPa
Max.pressure	3MPa
Connector	Φ6,1/4''
display	4-digit display
Working temp. environment	5~45High purity gas
Pressure vacuum gauge	－0.1～0.15 MPa, 0.01 MPa/grid
Shut-off valve	Φ6
Internal and external Polished ss pipe	Φ6

4、low vacuum unit

Relative air humidity	≤85%
Working temp. environment	5℃～40℃
voltage	380V
pumping rate	32m³/h
ultimate vacuum	5X10-1Pa（No-load & cold state）
Working pressure range	1.01325X105～1.33X10-2Pa
Inlet diameter	KF40
outlet diameter	KF40
connetcing method	Use bellows, manual baffle valve connected to bellows