0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Model | KJ-T1200-PECVD system | |
|
Tube Furnace Part |
Display | LED |
| Chamber | Split type and upper part can be opened | |
| Continuous Working Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 300mm Customizable | |
| Heating Element | Resistance Wire With Mo | |
| Thermocouple | N type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 100 x 1500mm (OD x L) Approx. | |
| Material: High Purity Quartz | ||
| Temperature Control | PID automatic control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve | |
|
Supply Plasma RF Power |
Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
|
Vacuum Pump |
Diffusion Pump System | Ultimate vacuum:10-5~10-6 Torr. And Inside tube vacuum: 10-3 Torr~10-4 Torr. Include Rotary pump, Diffusion pump, Vacuum gauge, Water cooler, Connecting pipe, Box, Valve. |
| Mass Flow Meters (LCD Touch Screen) |
Two precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~500sccm MFC 2 for Argon : Gas flow range from 0~500sccm One gas mixing tank is installed on bottom case with 2 stainless steel needle valves is installed on left side of bottom case to control 2 type gases mixing manually. |
|
| Exhaust gas treatment equipment | 2 sets Spray tower 2 sets Activated carbon box 1 set Centrifugal blow |
|
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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