0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Part I: Standard Parts | |
| Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability |
| Reflection Power | 200W max. |
| Matching | Automatic |
| RF Output Port | 50 Ω, N-type, female |
| Noise | <50 dB. |
| Cooling | Air cooling. |
| Display | LED |
| Chamber | Split type and upper part can be opened |
| Continuous Woking Temp. | ≤1100℃ |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) |
| Temperature Zone | 500mm |
| Heating Element | Resistance wire with Mo |
| Thermocouple | K type |
| Temperature Control Accuracy | ±1℃ |
| Tube Size | 200mm OD X Length 1600 mm |
Material: Quarz Tube |
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| Temperature Control | PID automatic control via SCR power control |
| Heating curves | 30 steps programmable |
| Vacuum Flange |
Stainless Steel vacuum flange with valve |
| Power | 380V, 50 Hz, three phases at max.20KW |
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Rotary Vane Vacuum Pump
Flow rate: 4L/SThe rotary vane vacuum pump will be designed into a cart with wheel. |
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Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~100 sccm MFC 3: Gas flow range from 0~100 sccm (or according to your requirement)  |
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Pirani digital vacuum gauge  |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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