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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech Zhengzhou Protech
Detailed Parameters of the Product

Product Description:6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVD6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard Parts6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Display6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screen6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Chamber6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be opened6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. Temperature6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short time6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Rate6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Zone6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mm Customizable6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Element6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with Mo6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N type6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Control6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mm6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz Tube6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Control6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power control6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curves6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmable6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Flange6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output port6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary joint6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized Function6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tilt6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/min6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate Port6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supply6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Matching6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Automatic6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output Port6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, female6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Noise6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Cooling6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump System6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum Pump6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-56uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/S6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 18006uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 546uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620F6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/S6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 270006uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150ml6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed into6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccm6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccm6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccm6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needle6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixing6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manually6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnace6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnace6uuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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