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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product description:fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Modelfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard Partsfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnacefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Displayfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Chamberfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. Temperaturefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Ratefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Zonefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mmfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Elementfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with Mofa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouplefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K typefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Controlfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz Tubefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Controlfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmablefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Flangefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Powerfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phasefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized Functionfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate Portfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output Powerfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stabilityfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequencyfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stabilityfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection Powerfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Matchingfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Automaticfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output Portfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femalefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Noisefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Coolingfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Powerfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50Hzfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump Systemfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum Pumpfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/Sfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500Wfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620Ffa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/Sfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intofa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needlefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyfa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnacefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
fa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnacefa9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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