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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product description:scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnacescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperaturescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RatescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZonescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mmscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MoscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocouplescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K typescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmablescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phasescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output PowerscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stabilityscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequencyscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stabilityscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection PowerscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femalescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoisescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50HzscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumpscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500WscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intoscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needlescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyscOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnacescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
scOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnacescOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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