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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product Description:tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModeltPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartstPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnacetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplaytPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screentPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChambertPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperaturetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RatetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZonetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mm CustomizabletPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MotPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocoupletPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N typetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControltPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mmtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControltPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controltPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvestPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmabletPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output porttPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctiontPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tilttPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/mintPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PorttPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplytPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomatictPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PorttPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femaletPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoisetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumptPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/StPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/StPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mltPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intotPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needletPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingtPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallytPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnacetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnacetPqMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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