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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control Pannel4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precision4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFC4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customer4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interface4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ALD valve4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Two ALD valves with pulse controller (min 10 ms duration )4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuators4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Liquid-Vapor Generator4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Automatic liquid vapor generator is included and connect to ALD valve4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Max 1100ºC for continuous heating4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating Zones4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zone4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating length4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperature4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in between4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KW4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Anti-corrosive Pressure Gauge4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 3.8x10-5 to 1125 Torr measurement range4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cycle4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor element4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 10E-2 Torr vacuum can be achieved inside processing tube4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler Optional4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control module4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra cost4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Update Idea 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 · ( PE-ALD+CVD)  ( PE-ALD+PVD +CVD)4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Compliance4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Built-in Pfeiffer's pump is ELT Certification4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE Certified4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certified4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application Notes4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Application4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. 4tcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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