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Box Furnace
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Bell Furnace
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Crucible Furnace
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Trolley Furnace
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Atmosphere Furnace
Muffle Furnace-
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0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart · Control Two ALD valves with puls duation time and cycling with mico-second precision · Control For channels gas delivery with ±0.2%F.S via MFC · Display vacuum pressure · Other parameter upon request of customer · Please click picture below to see control interface
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ALD valve |
· Two ALD valves with pulse controller (min 10 ms duration ) · Capable of heating with thermal actuators |
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Liquid-Vapor Generator |
· Automatic liquid vapor generator is included and connect to ALD valve |
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· Max 1100ºC for continuous heating · Two programmable precision digital temperature controllers with 30 segments. · Two separate controlled Heating Zones · 200mm length for each heating zone · 400mm total in heating length · 250mm constant central temperature heating area if both zones were heated at the same temperature · 500ºC max temperature difference between two zones with thermal blocks in between · Input power: 208 – 240V AC input, single phase at max. 4KW · Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below
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Anti-corrosive Pressure Gauge |
· 3.8x10-5 to 1125 Torr measurement range · Anti-corrosive, gas-type independent · High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection · Fast atmospheric detection eliminates waiting time and shortens process cycle · Easy to exchange plug & play sensor element · Click the picture to view detail spec. |
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· 10E-2 Torr vacuum can be achieved inside processing tube · Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control module · Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra cost
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Update Idea |
· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). |
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· Built-in Pfeiffer's pump is ELT Certification · CE Certified · All electric components ( >24V) are UL / MET / CSA certified · The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. |
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa · Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. · The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube · Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C |
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Application |
· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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( PE-ALD+PVD +CVD)
