|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PanneleJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precisioneJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFCeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customereJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interfaceeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
ALD valveeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Two ALD valves with pulse controller (min 10 ms duration )eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuatorseJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
Liquid-Vapor GeneratoreJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Automatic liquid vapor generator is included and connect to ALD valveeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Max 1100ºC for continuous heatingeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating ZoneseJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zoneeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating lengtheJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperatureeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in betweeneJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KWeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture beloweJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
Anti-corrosive Pressure GaugeeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· 3.8x10-5 to 1125 Torr measurement rangeeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectioneJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cycleeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· 10E-2 Torr vacuum can be achieved inside processing tubeeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture beloweJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionaleJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control moduleeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra costeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
Update Idea eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 · ( PE-ALD+CVD)  ( PE-ALD+PVD +CVD)eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Built-in Pfeiffer's pump is ELT CertificationeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE CertifiedeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certifiedeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NoteseJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
|
ApplicationeJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. eJmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
English
简体中文
Français
日本語
한국어
Português
Русский
Español
