Zhengzhou Protech
Zhengzhou Protech
Home > Products > Tube Furnace > PECVD Furnace

Product

Contact Us

Leave Message

Contact Us

Please leave a message. Get answers next business day.

Name *

Tel/WhatsApp *

E-mail *

Country

Raw Materia

Message *

Verification code *

I can't see clearly, refresh
High vacuum PECVD system
model:PT-T1200

High vacuum PECVD system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product Overview:
   PT high vacuum PECVD system is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.
vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Main features of high vacuum PECVD system :vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Technical Parameter:vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

product namevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

High vacuum PECVD systemvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Slide rail tube furnace partvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Product numbervWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-T1200vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube sizevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Φ50mmX1600mmvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube materialvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Quartz tubevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating zonevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

300mmvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating temperaturevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1100°CvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum temperaturevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200°CvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control methodvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K-type thermocouplevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

way to controlvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to usevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control accuracyvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control protectionvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

With over-temperature and burnout protection functionvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ratevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-20ºC/min, recommended 10ºC/minvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating elementvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Molybdenum resistance wirevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating VoltagevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AC 220V single-phase 50HZ (circuit voltage users can choose to customize)vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

heating powervWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3KWvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace materialvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Alumina polycrystalline fibervWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace structurevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace body has a slide rail, which can realize rapid heating and coolingvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flange jointvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installedvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Sealing systemvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

casevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless steel housingvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OptionalvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Auxiliary cooling fanvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

                     Vacuum system partvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum systemvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3pavWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracyvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pneumatic system partvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-way mass flow metervWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. MFC 1-MFC4: 0-1000sccm adjustablevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. A mixing tankvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Air inlet and outlet: 3 in and 1 outvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flow control: manual rotary adjustmentvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Connection mode: double card sleeve connectionvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Plasma power supply partvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

500W plasma power supplyvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power rangevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-500W (continuously adjustable)vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

working frequencyvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56MHZ+0.005%vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating modevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous outputvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF output impedance interfacevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N-type, female (50Ω)vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power stabilityvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤2WvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum reflected powervWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

70WvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power protection settingsvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DC over current protection, power amplifier over temperature protection, reflected power protectionvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Supply voltage/frequencyvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Single-phase AC (187V-253V) 50-60HZvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

cooling methodvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Wind coolingvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Overall sizevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

88X483X550 MMvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Total WeightvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.5KGvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CertificationvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ISO certification, CE certificationvWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

After-sales servicevWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)vWmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PECVD system
Zhengzhou Protech

After-sales serveces

After-sales serveces
Contact Us

Please leave your requirements

We provide 24/7 hours global online service, one-stop customized service, welcome to consult.

I can't see clearly, refresh