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model:PT-TCVD1100-S60CK2

PT-TCVD1100-S60CK2 Dual temperature zone slide type CVD System

Application

Detailed Parameters Of The Product

Introduction to CVD system:
The CVD system mainly consists of: 1200-degree dual-temperature zone slide tube furnace, high vacuum molecular pump vacuum system, 6-way mass flow meter gas supply system and other connectors;

Main feature:
1. The furnace body adopts an upper and lower "split-close" structure, making it easy to take and place the furnace tube;
2. The interior of the furnace is designed with a convection grid, and the air flow inside the furnace body can easily form up-and-down convection circulation, which is beneficial to furnace temperature balance and uniform temperature field.
3. The entire furnace body adopts a double-layer inner tank structure with an air gap in the middle. Even if the temperature of the furnace is as high as 1000°C, the surface of the furnace body can still be touched safely without feeling hot.
4. The heating elements of the furnace are evenly distributed axially in a circumferential shape, and the heating elements have been embedded and solidified, so that the heat energy radiates evenly and gently during heating.
5. The gas flow is accurately measured and controlled using a touch screen 6-way mass flow controller.
6. The high vacuum molecular pump unit can quickly replace gas in the furnace tube and achieve high vacuum in the tube.

The main technical parameters:

Product name	Dual temperature zone slide type CVD System
1200 double temperature zone slide tube furnace
Chamber type	open-type
Furnace sliding	The material can be quickly cooled and heated by sliding left and right on the guide rail.
Chamber material	Alumina refractory fiber
Heating element	Molybdenum heating wire
Max.temperature	1200℃
Working temperature	≤1100℃
Heating rate	≤20℃(Suggest:15℃/min)
Heating zone	Double zone
Total length of temperature zone	200+200mm
Furnace tube material	High purity quartz
Furnace tube diameter	60mm
Sealing method	A set of stainless steel vacuum flanges (including sealing silicone rings). One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets.
control mode	Multi-stage intelligent PID program temperature control
Temperature measuring element	K type thermocouple
Call the police	With overtemperature and disconnection alarm
Power supply	220V 50HZ
Air supply system KJ-6Z
Operating Voltage	220V/50HZ
Maximum output power	18W
Operating temperature	5--45℃
Maximum air pressure	3*106Pa
gas channel	Can connect to 6 gas sources at the same time The mass flow meter and gas mixing tank are installed in the mobile box
flow meter	Mass flow meter (other ranges are optional and do not affect the price)
A channel range	0～300SCCM
B channel range	0～300SCCM
C channel range	0～300SCCM
D channel range	0～300SCCM
E channel range	0～300SCCM
F channel range	0～300SCCM
Air line pressure	-0.1～0.15 MPa
Shut-off valve	Stainless steel material
Gas connection pipe	stainless steel pipe
Vacuum system (including stainless steel bellows and related connection accessories)
Vacuum pump + digital vacuum gauge	Molecular pump unit and corresponding connecting pipe fittings 220V/50HZ Pulleys are installed at the bottom for easy movement, and a high-temperature furnace can be placed above it. The ultimate vacuum degree can achieve 6.67*10-3pa.
Random Accessories	1 quartz furnace tube, 1 set of vacuum flange, 2 furnace tube plugs, O-ring seals, 1 pair of protective gloves, 1 crucible hook, 3 meters of PTFE tube, 2 Allen wrenches, and 1 instruction manual.