0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Product name | Dual temperature zone slide type CVD System |
| 1200 double temperature zone slide tube furnace | |
| Chamber type | open-type |
| Furnace sliding | The material can be quickly cooled and heated by sliding left and right on the guide rail. |
| Chamber material | Alumina refractory fiber |
| Heating element | Molybdenum heating wire |
| Max.temperature | 1200℃ |
| Working temperature | ≤1100℃ |
| Heating rate | ≤20℃(Suggest:15℃/min) |
| Heating zone | Double zone |
| Total length of temperature zone | 200+200mm Customizable |
| Furnace tube material | High purity quartz |
| Furnace tube diameter | 60mm Customizable |
| Sealing method | A set of stainless steel vacuum flanges (including sealing silicone rings). One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets. |
| control mode | Multi-stage intelligent PID program temperature control |
| Temperature measuring element | N type thermocouple |
| Call the police | With overtemperature and disconnection alarm |
| Air supply system KJ-6Z | |
| Operating temperature | 5--45℃ |
| Maximum air pressure | 3*106Pa |
| gas channel | Can connect to 6 gas sources at the same time The mass flow meter and gas mixing tank are installed in the mobile box |
| flow meter | Mass flow meter (other ranges are optional and do not affect the price) |
| A channel range | 0~300SCCM |
| B channel range | 0~300SCCM |
| C channel range | 0~300SCCM |
| D channel range | 0~300SCCM |
| E channel range | 0~300SCCM |
| F channel range | 0~300SCCM |
| Air line pressure | -0.1~0.15 MPa |
| Shut-off valve | Stainless steel material |
| Gas connection pipe | stainless steel pipe |
| Vacuum system (including stainless steel bellows and related connection accessories) | |
| Vacuum pump + digital vacuum gauge | Molecular pump unit and corresponding connecting pipe fittings 220V/50HZ Customizable Pulleys are installed at the bottom for easy movement, and a high-temperature furnace can be placed above it. The ultimate vacuum degree can achieve 6.67*10-3pa. |
| Random Accessories | 1 quartz furnace tube, 1 set of vacuum flange, 2 furnace tube plugs, O-ring seals, 1 pair of protective gloves, 1 crucible hook, 3 meters of PTFE tube, 2 Allen wrenches, and 1 instruction manual. |