0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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Product Overview:
This customized CVD system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, and SCR control. The furnace uses aluminum oxide polycrystalline fiber material and the furnace tube Both ends are sealed with stainless steel flanges. The stainless steel flanges are equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.
Technical Parameter:
|
product name |
Custom CVD system |
|
Product number |
PT-CVD-DZ |
|
Vertical tube furnace part |
|
|
Furnace mode |
Vertical open type |
|
Furnace material |
Imported alumina refractory fiber |
|
Heating element |
High quality silicon carbide rod |
|
Limit temperature |
1400°C |
|
Operating temperature |
≤1300℃ |
|
Heating rate |
≤20℃ (recommendation: 15℃/min) |
|
Heating temperature zone |
Single temperature zone, multiple temperature zone |
|
Furnace tube material |
High purity quartz tube, corundum tube |
|
Tube diameter |
40, 50, 60, 80, 100mm... (Customizable) |
|
Sealing method |
A set of 304 stainless steel vacuum flange (including sealing silicone ring) |
|
Control mode |
Multi-segment intelligent PID program temperature control, reserved communication interface |
|
Temperature control accuracy |
±1℃ |
|
Temperature curve |
Multi-segment "time-temperature curve" can be set arbitrarily |
|
Temperature measuring element |
N-type thermocouple |
|
Pneumatic system part |
|
|
Operating temperature |
5--45℃ |
|
Gas channel |
Multiple air sources can be connected at the same time |
|
Flowmeter |
Mass flowmeter |
|
Range A |
0～500SCCM |
|
Range B |
0～500SCCM |
|
C-channel range |
0～500SCCM |
|
..... |
..... |
|
Air pressure |
-0.1～0.15 MPa |
|
Shut-off valve |
Stainless steel material |
|
Gas connection pipe |
1/4 stainless steel tube |
|
Digital display vacuum gauge and connecting parts |
|
|
Digital display vacuum gauge |
Digital display vacuum gauge installed on stainless steel flange |
|
Vacuum pump set (related connection accessories) |
|
|
Vacuum pump |
Vacuum pump and corresponding connecting pipe 220V/50HZ (Customizable) |
|
After-sales service |
One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty) |
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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