The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical ParameterTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating system:TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. Temp：1200cTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working temp.：≤ 1100cTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size：Ø60*420*2+Ø100*360mm* CustomizableTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation rate：0~60r/minTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace body inclination angle：0~35°TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp accuracy：±1℃TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp control：PID automatic control with 30 steps programmableTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation interface：10”LCD touch screen controlTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating zone length：200mm+200mm CustomizableTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Constant zone length：250mm CustomizableTzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Feeding system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Discharge system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The discharging system can automatically discharge when the furnace body is inclined and discharged.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas control system:TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low vacuum system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Separation system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
the system allows the separation of gas and material during the protection of the inflator or when vacuuming.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Filtering system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation system：TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Allows the tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time.TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
TzRMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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