0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Casing |
*Double layer steel casing with air cooling. * Furnace shell <=60℃ |
| Processing Tube | *Material: Fused quartz tube (80 mm OD X 1000 mm L, and SS flanges) |
| Heating Element | Fe-Cr-Al Alloy doped by Mo |
| Working Temperature |
*Max. Heating Temp.: 1200°C *Continuous Working Temp.: 1100°C |
| Heat-up Rate | Heat-up rate: 1 - 10°C/min |
| Heating Zone Length |
*Total heating zone: 440 mm *Constant Temp. Zone: 150 mm (± 1°C) |
| Temperature Control |
*LCD Touch Screen *Temperature accuracy: ± 1°C *Thermocouple: K type built inside the furnace |
| Vacuum Side |
One pair of stainless steel vacuum flange (gas and vacuum sides) with: *one mechanical pressure gauge (compatible with MFC system) *two needle valves (1/4'') *one KF-25 connector, KF-25 vacuum block valve, KF-25 SS vacuum bellows, KF-25 quick clamp with rubber o-rings, adjustable flange support (left and right side - 2 pcs) for KF-25 flanges, etc. for the high vacuum station |
| High Vacuum Station structure |
*Max. Loading: 100 Lbs on top *High vacuum station control panel (for basically molecular pump speed and vacuum levels): *Inside: Turbo Molecular vacuum pump station # All connections and fitting and valves between turbo pump and backing pump-dry pump and quartz tube section according to the KF-25 connection norm |
| Vacuum Level | 6.7*10-3pa (under empty and room temp. condition) |
| Mass flow gas control structure |
*3 channels: #Controller-1: 1 - 100 sccm #Controller-2: 1 - 200 sccm #Controller-3: 1 - 500 sccm *Working voltage: AC 220 V / 50 Hz *7'' color touchscreen control, *With mechanical pressure gauge, needle valve, gas pipeline, gas mixing tank, stop valves and fittings, etc. included *Made of 316 stainless steel valve |
| Total power consumption of the system | 5 kW |
| Rated voltage of the whole system | AC 220 V, Single Phase, 50 Hz |
| Customized Vacuum Flange With Three Feedthoughs, Gas Valve and Mechanical Pressure Gauge |
Compatible for 80 mm quartz tube (above system), three thermocouple feedthoughs (K type TC) - which will be used only for center and the two ends of constant temperature zones inside the quartz tube (for temperature calibration between PID / TC and real constant zone temperatures). This unit will not be used during the normal processes. Feature: *Made of 304 Stainless Steel with double high-temperature silicone O-ring. *Three feedthrough, one valve and one mechanical gauge are installed on the flange. *The feedthroughs are fit to 1/4" O.D steel pipes of thermocouples K-type with K-type cable plugs. *1/4" tube fitting to make additional gas inlet or outlet is connected to valve. *The assembly kit will seal 80 mm OD quartz tube. |
| K type thermocouple | Temperature measured by 3 calibration thermocouple will be display on the LCD touch screen of Tube furnace directly. |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
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