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model:PT-TPECVD1100-S80CK3

Automatic Rotary Tilt Tube PECVD System

Application

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Detailed Parameters Of The Product

Specific Introduction:

The PT-TPECVD1100-S80CK3 tube PECVD system utilizes microwave or radio frequency to ionize gas containing atoms composed of thin films, forming a plasma locally. The plasma has strong chemical activity and is prone to reactions, depositing the desired thin film on the substrate. The system is mainly used in metal powder coating and can rotate and tilt. The PT-TPECVD1100-S80CK3 tube PECVD system belongs to one of the PECVD System.

Realistic view of automatic rotating inclined tube PECVD system

Features:

1. Good air tightness
The 1200 ℃ tube PECVD system adopts an O-ring compression seal between the furnace tube and the flange, which is easy to remove and can be repeatedly removed. It has good airtightness and magnetic fluid sealing, ensuring that vacuum can be extracted during the rotation process.

2. Temperature field equilibrium
Adopting polycrystalline fiber furnace material, the material has good insulation performance, high reflectivity, and a balanced temperature field.

3. Rotatable and tilted
The 1200 ℃ tube PECVD system mainly adopts J-T1200 rotary tube furnace, which can tilt and rotate 360 degrees, with a speed of 0-15 revolutions (adjustable speed); The inclination angle is 0-15 ° (adjustable) for easy feeding and discharging, and a lifting plate is installed in the pipeline to evenly heat the material in the furnace.

4.Temperature control protection
Equipped with ultra mild couple breaking protection function.

Technical parameters:

Product name	Automatic Rotary Tilt Tube PECVD System (CE Cert)
Rotary Tube Furnace Part
Model	PT-TPECVD1100-S80CK3
Heating zone length	660mm（220+220+220mm Three temperature zone）
Constant temperature zone length	400mm
Furnace tube material	High-purity quartz tube (reducing tube)
Furnace tube size	Reducer Dimensions at both ends OD: 80mm* 400mm Middle size OD: 150mm* 400mm The total length is 1200mm, the middle part of the furnace tube is welded with the lifting plate
Working temperature	≦1100℃
Max.temperature	1200℃
Temperature measuring element	3 K-type thermocouples for temperature control
Temperature Control System	7-inch touch screen display, 16-segment storable curves, 30-segment PID microcomputer programmable automatic control, can store and copy data
Insulation temperature control accuracy	±1℃
temperature protection	With over temperature and burnout protection function
Heating rate	0-20ºC/min
Heating element	Alloy resistance wire
Operating Voltage	AC 220V single-phase 50HZ
Maximum power	5KW（subject to actual power )
Furnace chamber material	Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field
sealing system	The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness.
Flange	Water-cooled sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials
inclined structure	Can be tilted with an inclination angle of 0-15° (adjustable inclination angle) to facilitate material in and out
rotating structure	Can rotate 360 degrees, speed 0-15 revolutions (speed adjustable) The material is evenly heated in the furnace
Furnace shell temperature	≤45℃
vacuum system part
Name	Molecular pump set
pump set	Rotary vane pump + molecular pump
The main parameters	The ultimate vacuum is 6.7*10-3Pa (including KF25 interface, vacuum baffle valve and movable box)
vacuum display	Imported capacitive diaphragm vacuum gauge, corrosion-resistant, real-time display of vacuum degree
Vacuum display range	Its measuring range is 1×105--1×10-5pa
rotary seal	Magnetic fluid seal to ensure that vacuum can be pumped during rotation
Air system part
Name	Three-way mass flow meter
Gas line	Three-way
flow control	LCD touch screen control, digital display, each gas contains separate needle valve control, automatic gas flow control
Air inlet and outlet	Three in and one out, built-in precision mixing tank
link method	Double Ferrule Fitting
flow range	MFC1-MFC3: 0-10SLM (range optional)
control precision	About ±1.5%F.S, different ranges, slightly different
maximum withstand voltage	1.1Mpa
Working temperature	5℃-45℃
Plasma radio frequency part
Name	RF automatic matcher
Model	VERG-500+VENA-500
Matching power range	0-500W
working frequency	13.56MHZ+0.005%
Normal working reflected power	＜3W
match time	＜3S
transmission efficiency	＞90%
Use stability	±1%F.S
Matching power supply	AC220V/50-60HZ
input connector	N type
output connector
control mode	Manual / Auto
Preset points can be set	7
Matching Impedance Range	Real part 0-80Ω Imaginary part-j200-j200 (impedance can be adjusted according to load)
Matching size	340X230X130 MM
Provide related accessories	1 set of gas circuit, 1 set of radio frequency power supply, 1 set of vacuum pump group, 2 furnace plugs, 1 pair of sealing flanges, 1 piece of quartz tube, 2 pairs of sealing rings, 1 pair of high-temperature gloves, 1 piece of crucible hook, 1 piece of vacuum pump connecting pipe fittings Set, 1 hex wrench for disassembling the flange, 1 copy of warranty card manual, etc.