model:PT-O1200-4CPECVD
Large diameter pecvd system
Application: This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
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send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Brief Intrudction:nGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
This equipment is mainly used for lab scale graphene growth and preparation, and it can be used for the growth of carbon nanotubes. High-quality transparent conductive film can be prepared for use in mobile phone touch screens, tablet computers, smart wearables, sensors and other fields.nGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
nGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Specification:
Model |
PT-O1200-4CPECVD |
Display |
LED |
Max. Temperature |
1200℃ |
Continuous Woking Temp |
≤1100℃ |
Heating Rate |
0~20℃/min |
Temperature Zone |
Single |
Accuracy |
±1℃ |
Tube Size |
Ø60*1250mm(OD×L) |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Heating zone |
440mm |
constant heating zone |
150mm |
Power |
220V, 50 Hz, single phase at max. 4KW |
Output Power |
5 -500W adjustable with ± 1% stability |
RF frequency |
13.56 MHz ±0.005% stability |
Reflection Power |
200W max. |
Matching |
Automatic |
RF Output Port |
50 Ω, N-type, female |
Noise |
<50 dB. |
Cooling |
Air cooling. |
Power |
220V, 50Hz |
Anti-corrosive Pressure Gauge |
3.8x10-5 to 1125 Torr measurement rangenGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Anti-corrosive, gas-type independent |
Vacuum System |
Rotary vane pump+diffusion pump, max vacuum rate 6.67*10pa |
Mass Flow meters |
Four precision mass flow meters :nGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 1: Gas flow range from 0~100 sccmnGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 2&3: Control range from 0~200 sccm nGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 4: Control range from 0~500 sccmnGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac One gas mixing tank is installed on bottom case with liquid release valvenGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manuallynGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Gas inlet fitting: four 1/4NPSnGDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Gas outlet fitting: four 1/4NPS |