ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precisionffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFCffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customerffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interfaceffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ALD valveffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Two ALD valves with pulse controller (min 10 ms duration )ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuatorsffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Liquid-Vapor GeneratorffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Automatic liquid vapor generator is included and connect to ALD valveffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Max 1100ºC for continuous heatingffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating ZonesffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zoneffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating lengthffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperatureffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in betweenffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KWffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Anti-corrosive Pressure GaugeffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 3.8x10-5 to 1125 Torr measurement rangeffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cycleffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 10E-2 Torr vacuum can be achieved inside processing tubeffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control moduleffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra costffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Update Idea ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· ( PE-ALD+CVD) ( PE-ALD+PVD +CVD)ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Built-in Pfeiffer's pump is ELT CertificationffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE CertifiedffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certifiedffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ApplicationffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. ffXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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