Main FeaturesUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. The vacuum control units are all assembled in one control box.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Adopt independent evaporation current controller, convenient and fast operation.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. The vacuum chamber is equipped with a KF40 side extraction valve (directly connected to the pre-stage mechanical pump to improve efficiency), a CF150 gate valve (directly connected to the molecular pump), and a KF16 flange (installed resistance gauge) 6. 6 CF35 flanges (1 with ionization gauge, 1 with 2-core electrode, and 1 with thickness gauge) 3 spares.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Equipped with 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. The sample stage is installed on the top of the cavity.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. A high-resolution film thickness gauge can be installed in the cavity, and the resolution (aluminum) of the film thickness measurement is 0.1Å.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Circulating water cooler can be used.USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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SpecificationUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KWUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polishedUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Observation window: Ø100mm, sealed with special sealing ringUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / sUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. Vacuum: 8.0x10-4PaUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Ultimate vacuum 8.0x10-5PaUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. Leakage rate: 6.7 × 10-8Pa · L / SUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9. Sample stage: φ120USUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. The distance between the evaporation boat and the sample table: 150-210mmUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
11. Demand for cooling water: 15L / minUSUMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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