0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Model | PT-PECVD-1200-50*300-F3 | |
| Heating system | Display | LED |
| Limit Temperature | 1200℃ | |
| Continuous Working Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~15℃/min (max. 20℃/min) | |
| Temperature Zone | 300mm | |
| Heating Element | Resistance with Mo | |
| Thermocouple | K type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 60 x 1200mm | |
| Material: alumina | ||
| Temperature Control | PID automatic control via SCR power control | |
| Heating process | 30 steps programmable | |
| Power source | 220V, 50 Hz, single phase at max. 3KW | |
| Max working pressure | 0.02MPa | |
| Vacuum System |
Rotary vane pump Include KF25 Adpater, bellow for vacuum pump group and mobile cabinet with wheels. |
Ultimate vacuum 10Pa under cold state. |
| Vacuum gauge | Inficon digital vacuum gauge | |
| Vacuum Flange | Stainless Steel vacuum flange with valves and needles | |
| Mass Flow meters |
Flow scope | CO2 (flow range: 0-200 sccm CH4 (flow range: 0-200 sccm) N2 the flow range (flow range: 0-200 sccm) |
| Accuracy | ±1.5 % F.S. | |
| Repeat accuracy | ±1.5 % F.S. | |
| Response time | ≦10sec | |
| Working pressure difference range | 0.1~0.5MPa | |
| Pressure resistance | 3MPa | |
| Temperature Coefficient | Zero: ≤±0.2% F.S./℃; Span: ≤±0.2% F.S./℃ | |
| Working environment temperature | 5~45℃ | |
| Input signal | 0 V ~ +5.00 V | |
| Output signal | 0 V ~ +5.00 V | |
| Electric plug form | DB15 pin（Female） | |
| Power | +15 V 50 mA -15V 200 mA |
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| Plasma RF Generator | Output Power: 0 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 120W max. Power stability index: ± 0.1% Matching: Automatic Noise: <50 dB. Whole efficiency:≧70% |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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