Two Channels ALD Tube Furnace System

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precisionwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFCwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customerwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interfacewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valvewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuatorswJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor GeneratorwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valvewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heatingwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating ZoneswJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zonewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating lengthwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperaturewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in betweenwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure GaugewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10^-5 to 1125 Torr measurement rangewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cyclewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor elementwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tubewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control modulewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra costwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnacewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CompliancewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT CertificationwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certifiedwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NoteswJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpawJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubewJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ApplicationwJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. wJ6Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac