Two Channels ALD Tube Furnace System

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precisionWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFCWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customerWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interfaceWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valveWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuatorsWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor GeneratorWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valveWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heatingWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating ZonesWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zoneWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating lengthWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperatureWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in betweenWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure GaugeWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10^-5 to 1125 Torr measurement rangeWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cycleWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor elementWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tubeWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control moduleWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra costWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT CertificationWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certifiedWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ApplicationWdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. WdwMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac