Two Channels ALD Tube Furnace System

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precisionrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFCrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customerrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interfacerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valverVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuatorsrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor GeneratorrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valverVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heatingrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating ZonesrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zonerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating lengthrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperaturerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in betweenrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure GaugerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10^-5 to 1125 Torr measurement rangerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cyclerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor elementrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tuberVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control modulerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra costrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnacerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CompliancerVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT CertificationrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certifiedrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MparVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tuberVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ApplicationrVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. rVvMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac