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Home > Products > Tube Furnace > PECVD Furnace

model:PT-T1200RTR-III-80

Roll to roll pecvd system for constant graphene film production

Application

Detailed Parameters Of The Product

Main feature
Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .

Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene

Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device

Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.

Voltage	Furnace input AC 208-240V ，50/60 Hz
Power	6KW
Working Temperature	· Max. Temperature: 1200 °C · Continuous working temperature: 1100 °C
Heating Zone	· Heating Zone Length: 7.87" ( 200+200+200mm) · Constant Temperature Zone: 15.74 " (400mm. +/- 1ºC )
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Processing Tube	· High purity quartz tube: 100 mm OD x 1700 mm Length
Copper foil width	≤80mm
Copper foil running rate	8cm/min---50cm/min Adjustable
RF Signal frequency	13.56MHz±0.005%W
Power output	0-500W
Vacuum Dgree	10-1Pa
Dimensions	28060130cm
Application Note	· Equipped with high precision mass flowmeter in the gas system,can control the gas flow · Gas can mix sufficient in required proportion in the static mixing chamber,

Pre:Roll-to-roll PECVD Furnace
Next:Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment

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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司

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