0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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Description：
PECVD furnace(Plasma Enhanced Chemical Vapor Deposition), which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.
| Split Tube furna | · 1200°C Max. working temperature for < 60 minutes · 1100°C Max for continuous heating · High purity quartz tube 2"OD x 1.7"ID x 39.4" Length · 30 segments programmable precision digital temperature controller · 8" (200mm), single zone. 2.3" (60mm) Customizable |
Plasma RF Generator |
· Reflection Power: 200W max. · Matching: Automatic · RF Output Port: 50 Ω, N-type, female · Noise: <50 dB. · Cooling: Air cooling. Customizable |
Anti-corrosive Pressure Gauge |
· 3.8x10-5 to 1125 Torr measurement range · Anti-corrosive, gas-type independent · High accuracy and reproducibility at atmosphere for reliable · atmospheric pressure detection · Fast atmospheric detection eliminates waiting time and shortens · process cycle · Easy to exchange plug & play sensor element · Click pic to view detal spec. Customizable |
| Mass Flow meters | · Four precision mass flow meters (0.02% accuracy) · with digital display are installed on the bottom case to control gas flow rate automatically. · MFC 1: Gas flow range from 0~100 sccm · MFC 2&3: Control range from 0~200 sccm · MFC 4: Control range from 0~500 sccm · One gas mixing tank is installed on bottom case with liquid release valve · 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually · Gas inlet fitting: four 1/4NPS · Gas outlet fitting: four 1/4NPS |
| Vacuum Pump | · 2 Liter /S or 120 liter/m · Oil trap (inlet) and exhaust filter (outlet) are installed. |
| Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the eplacement at related products below.) The furnace can be customized according to customers’ requirements. |
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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