Zhengzhou Protech
Zhengzhou Protech
Home > Products > Tube Furnace > Ordinary Tube Furnace

Product

Contact Us

Leave Message

Contact Us

Please leave a message. Get answers next business day.

Name *

Tel/WhatsApp *

E-mail *

Country

Raw Materia

Message *

Verification code *

I can't see clearly, refresh
Tube Furnace with Solid Precursor Sublimator for CVD Growth
model:PT-1200X

Tube Furnace with Solid Precursor Sublimator for CVD Growth

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Introduction:

     PT-1200X is a compact 1100°C CVD tube furnace with precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading. Such a system configuration is suitable for growing a wide range of transitional metal dichalcogenides (such as MoSe2, MoS2...) and wide bandgap semiconductors (such as h-BN) layers on substrate up to 3" diameter. rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace and PreheaterrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 4.33" O.D x 4.05" I.D x 29.13" Length quartz tuberscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 1100ºC Max. working temperaturerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on right-side is slidable for easy sample loadingrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealingrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flangerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,  or evaporate solid chemical, which will be then delivered to CVD furnace:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture left for more details:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1.2''O.D x 6''L SS tube as the heating chamberrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 600ºC Max. working temperaturerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · Flange on the left side is for gas sealing and inputrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated VoltagerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power consumptionrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. 3600 W (20 A breaker required)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating ZonerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:  440 mmrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Constant temperature zone: 100 mm rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Gas Heater:     150mmrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working TemperaturerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 Max heating temperature: 1100°C ( < 2 hour )rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: 200~1000°CrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Heater: rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: RT~600°CrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace and Heater (separate temp control):rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Digital controllers with PID/self-tuning functions and 30 segments programmablerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple:  K type thermocouples, which feed through the right side flange and control furnace temperature.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Control accuracy: +/- 1°CrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RS485 Communications PortrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum and Gas Sealing & FlangerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The right flange of CVD furnacerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· KF25 vacuum fitting (to a vacuum pump, please click to order a pump,  vacuum hose, valve and sealing gasket)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Slidable for the customer to easily and fast push/pull in/out samplerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· An anti-corrosive capacitance diaphragm gauge is includedrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/8'' fitting for delivering heated gas from heater to CVD furnacerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flangerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holderrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corrodedrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heater:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnacerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Furnace Chamber InstallationrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 2- 1/4" pipe adapter is installed on each flangerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The optional Liquid Injection devicerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

For direct liquid CVD  ( DLCVD), you may consider below devices for liquid injection:rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                   
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Net weightrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

110kgrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DimensionsrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Standard:    62"L X 18"W X 23"HrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Maximum:   80"L X 18"W X 32"H  (Lid open and right-side flange slided out)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarrantyrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may order replacement quartz tube here.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Laptop, software & WiFi Control (Optional)frscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· A wireless remote control provides up to 300 meters operating range.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Above features are available upon request at an extra cost. Please contact us for more information.rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CompliancerscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CE CertifiedrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· NRTL(UL61010)  or CSA certifications are available at extra cost. rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarningrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Vacuum pressures may only be safely used up to 1000°C rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tuberscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation Demo Video & InstructionsrscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

     rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rscMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
Zhengzhou Protech

After-sales serveces

After-sales serveces
Contact Us

Please leave your requirements

We provide 24/7 hours global online service, one-stop customized service, welcome to consult.

I can't see clearly, refresh
chat with us