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model:OTF-1200X-80-II-M4LV

Dual Zone Quartz tubular furnace

Application

Detailed Parameters Of The Product

Description：
Dual Zone Quartz tubular furnace is a CE certified and ready to pass UL/CSA certification spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.

1.Features of Dual Zone Quartz Tube Furnace :
(1). Operation Temperature: 1100°C ( 1200°C for short time).
(2). Maximum energy efficiency is achieved by surrounding the chamber with thermal-efficient alumina fiber ceramic insulation.
(3). Heavy duty double layer structure with cooling fan. Lower temperature in outside case.
(4). PID automatic control via current limiting phase angle fired the resistor, e.g. SCR(Silicon Controlled Rectifier).
(5). Power control with 30 segments programmable.

We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!

2.Technical parameters of Dual Zone Quartz Tube Furnace :

Power	208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)
Heating Temperature	Max. Temperature: 1200°C Continuous Temperature: 1000°C
Heating Zone	Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length
Constant Temperature Zone	If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long with a temperature discrepancy of +/- 1°C. If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Max. Heating Rate	<= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)
Tube Size and material	Quartz Tube: 80 ODx 72 IDx 1000 L
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controller	Two precision temperature controllers to control two zones separately. PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port.
Gas Mix Station	Four precision mass flow controller ( MFC) with digital display · MFC 1: Control range from 0~100 sccm · MFC 2: Control range from 0~200 sccm · MFC 3: Control range from 0~200 sccm · MFC 4: Control range from 0~500 sccm Gas route: 4 routes Flowing rate accuracy: 0.2% accuracy Gas inlet and outlet: 1/4" swagelok tube connector One gas mixing tank installed on bottom case with liquid release valve. Each gas route with SS needle valve to on-off control independently.
Vacuum pump	120 L/m Rotary Vane Vacuum Pump with Oil Trap (220V single phase) and stainless steel hose tube are included for connecting to tube furnace. Max. achievable vacuum pressure is 10^-2 torr.
Vacuum gauge	Power Connection:9 pins D-sub connector. Power Adapter:One 24V,1A DC power adapter is included and ready to use. Input voltage for the adpter is 110~240V. Measurement Range:3.8x10-5 to 1125 Torr. Display:Digital display (20x14mm) with measurement unit torr Gauge Fitting:Small Foot-Print with 1/8"NPT fitting Dimensions:46mm×28mm×126mm ( L x W x H)
Certificate	CE