0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Part I Tube furnace | ||
| Furnace structure | - Double-layer steel structure with air cooling. - Split door design for easy installation of tube. - High purity Al2O3 fibrous insulation designed for maximum energy saving. |
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| Furnace Tube (Horizontal) |
High purity quartz tube Tube diameter:OD30mm Heating zone length: double 300+300mm (Can be customized according to customer needs) |
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| Sealing Flanges (Horizontal) |
Left flange: water-cooled flange with a needle valve and a mechanical pressure gauge; Right flange: a flange with a KF25 port directly couples with the electrostatic precipitator. |
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| Furnace Tube (Vertical) |
High purity quartz tube Tube diameter:OD30mm Heating zone length: double 300+300mm - Frits with forced convection design can trap the particles within the central heating area Frit: 15~40 microns porous, 22mm O.D x 4mm thick (Can be customized according to customer needs) |
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| Sealing Flanges (Vertical) |
Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting; Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust. |
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| Working Temperature | ≤1100℃ (continuous) | |
| Maximum Temperature | 1200℃ (for short time) | |
| Temperature Controller | -Two separate temperature controllers. -30 programmable segments for precise control of heating rate, cooling rate, and dwell time. - Built-in PID Auto-Tune function with overheating & broken thermocouple protection. - Over-temperature protection and alarm allow for operation without attendant(s). - +/- 1 ºC temperature accuracy. |
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| Heating Rate | 0~20℃/min (suggestion: ≤10℃) | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | N type | |
| Work station | Horizontal and Vertical | |
| Part II Ultrasonic Enhanced Generator | ||
| System Features | 2.4MHz Ultrasonic Enhanced Generator 304 Stainless Steel 1.5" sanitary TEE fitting with 1/4'' tube fittings enable the use of carrier gas Fluoropolymer coated liquid container with fluoropolymer seals Microprocessor based control allows the user program operating parameters (time and the rate at which particles are being generated) into the unit, handling a wide variety of applications for accurate particle generation. Fluoropolymer optical sensor and Fluoropolymer valve for keeping the liquid level to the correct height and preventing damage to the nebulizing element, should the unit run dry. The use of quick clamps allows easy removal of components for cleaning or adapting the device with simple connections to gas supply |
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| Ultrasonic Power Setting | 0 to 100% of the full output capability, in 5% increments | |
| Part III Nanopowder Collection | ||
| Electrostatic Precipitator | Up to 30 kV and 1 mA. The use of KF25 enables the quick coupling to the furnace processing tube; |
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| Part IV Mass flow meter system | ||
| Mass Flow Meter (touch screen is optional) |
Three precision mass flow meters : MFC 1: Gas flow range from 0~500 sccm H2 MFC 2: Gas flow range from 0~1000 sccm N2 MFC 3: Gas flow range from 0~1000 sccm N2 One gas mixing tank is installed on bottom case with liquid release valve 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually. |
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| Part V Liquid Vaporization System | ||
| Heater & Temperature Controller | Liquid and carrying gas go through an SS316 coil, which is heated by a built in small furnace up to 550ºC The heating tube could be generate as secondary heating to prevent the liquid or gas cool down while passing through the tube. |
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| Gas Flow Control | Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL/min adjustable). Pressure gauge built in front panel Two SS needle valves are installed to control gas in and out . Vapor Gas outlet tube size: 1/4"OD SS316 |
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| Part VI Vacuum pump System | ||
| Rotary Vane Vacuum Pump | Flow rate: 8CFM (4L/S, 240L/min) Limit vacuum degree: 10Pa |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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