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PT-TCVD1600-L80LB3 is a CE certified three temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a dual rotating mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of the furnace can reach 1600 ℃ and the vacuum degree can reach 10pa. It belongs to a type of CVD system.
Actual photo of the 3-temperature zone tube CVD system
1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials.
2. Over temperature alarm and power off, leakage protection, safe and reliable operation.
3. Independent temperature controller. 30-level programmable temperature.
| Heating System(Tube Furnace) | |
| Max. temperature | 1700 ℃ |
| Working temperature | ≤ 1600℃ |
| Display | LED display Customizable |
| Tube size | 80mm(OD) Customizable |
| Tube Material | High Quality alumina tube |
| Hot zone length | 220+220+220mm(There will be a gap between each zones) Customizable |
| Heating Element | MoSi2 |
| Heating rate | 0-5℃/min |
| Temperature control | ● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. ● 30 programmable segments for precise control of heating rate, cooling rate and dwell time. ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. ● Over temperature protection and alarm allows for operation without attendant. |
| Thermocouple |
|
| Temperature accuracy | ±1℃ |
| Furnace structure |
|
| Vacuum Flange | Stainless Steel vacuum flange with valve. |
| Gas System | |
| 4 Channel Mass Flow Meter | Four precision mass flow meters: MFC 1: Gas flow range from 0~100 sccm MFC 2: Control range from 0~200 sccm MFC3: Control range from 0-500sccm MFC4: Control range from 0~200 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing. |
| Vacuum Pump +Vacuum Gauge System | |
| Vacuum Pump+Vacuum Gauge | Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State) |
Actual photo of the 3-temperature zone tube CVD system
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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