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model:PT-CVD-DZ

Custom CVD system

Application

Detailed Parameters Of The Product

Product Overview:
This customized CVD system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, and SCR control. The furnace uses aluminum oxide polycrystalline fiber material and the furnace tube Both ends are sealed with stainless steel flanges. The stainless steel flanges are equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.
technical parameter:

product name	Custom CVD system
Product number	PT-CVD-DZ
Vertical tube furnace
Furnace mode	Vertical open type
Furnace material	Imported alumina refractory fiber
Heating element	High quality silicon carbide rod
Limit temperature	1400°C
Operating temperature	≤1300℃
Heating rate	≤20℃ (recommendation: 15℃/min)
Heating temperature zone	Single temperature zone, multiple temperature zone
Total length of temperature zone	200, 300, 440
Furnace tube material	High purity quartz tube, corundum tube
Tube diameter	40, 50, 60, 80, 100mm...
Sealing method	A set of 304 stainless steel vacuum flange (including sealing silicone ring)
Control mode	Multi-segment intelligent PID program temperature control, reserved communication interface
Temperature control accuracy	±1℃
Temperature curve	Multi-segment "time-temperature curve" can be set arbitrarily
Temperature measuring element	K-type thermocouple
Pneumatic system
Operating Voltage	220V/50HZ
Maximum output power	18W
Operating temperature	5--45℃
Gas channel	Multiple air sources can be connected at the same time
Flowmeter	Mass flowmeter
Range A	0～500SCCM
Range B	0～500SCCM
C-channel range	0～500SCCM
.....	.....
Air pressure	-0.1～0.15 MPa
Shut-off valve	Stainless steel material
Gas connection pipe	1/4 stainless steel tube
Digital display vacuum gauge and connecting parts
Digital display vacuum gauge	Digital display vacuum gauge installed on stainless steel flange
Vacuum pump set (related connection accessories)
Vacuum pump	Vacuum pump and corresponding connecting pipe 220V/50HZ
Certification	ISO certification, CE certification
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)