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model:PT-T1200

Tube PECVD system

Application

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Detailed Parameters Of The Product

Equipment introduction:
Tube PECVD system is to use microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form plasma locally, and the plasma is very chemically active and easy to react, and the desired film is deposited on the substrate. High quality, SiO2 film, Si3N4 film, diamond film, hard film, optical film and carbon nanotube (CNT), graphene material, etc.This system is widely used in deposition.Belongs to a type of PECVD System.

Main functions and features:
1. The furnace body is equipped with: output voltage and output current monitoring meter, the heating status of the furnace can be seen at a glance.
2. The heating element adopts molybdenum-doped alloy heating wire, and the furnace insulation material adopts imported polycrystalline fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and the energy-saving effect is obviously better than domestic fiber materials.
3. The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of that of the same traditional electric furnace, which is energy-saving and environmentally friendly.
4. The entire furnace body adopts a double-layer liner structure with air gap isolation in the middle. Even if the furnace temperature is as high as 1200°C, the surface of the furnace body can still be safely touched without feeling hot.
5. Over-temperature alarm and power off, leakage protection, safe and reliable operation with multiple protection functions.

Specifications

Product name	Tube PECVD system (CE certification)
Slide tube furnace part
Model	PT-T1200
Heating zone length	300mm
Furnace tube size	diameter 120*1600mm
Working temperature	≦1100℃
Max. temperature	1200℃
Temperature measuring element	K type thermocouple
Temperature Control System	30-segment PID microcomputer programmable automatic control
Insulation temperature control accuracy	±1℃
temperature protection	With over temperature and burnout protection function
Heating rate	0-20ºC/min
Heating element	High resistance electric heating alloy wire OCr27A17Mo
Operating Voltage	AC220V single phase 50HZ
rated power	4KW
chamber material	Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field
sealing system	The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness.
Furnace tube	High purity quartz tube
French	304 stainless steel sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials
Furnace structure	Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling
Furnace shell temperature	≤45℃
vacuum system part
name	DRV16 Rotary Vane Pump 4L/S
The main parameters	Ultimate vacuum degree 10Pa (including KF25 interface, vacuum baffle valve and movable box)
vacuum display	Resistance digital display vacuum gauge, display range standard atmospheric pressure--10-1pa
Air system part
name	Four-way mass flow meter
Gas line	four way
flow control	Digital display, each channel of gas contains a needle valve for separate control, and the gas flow is automatically controlled
Air inlet and outlet	Four in and one out, built-in precision mixing tank
link method	Double Ferrule Fitting
flow range	MFC1-MFC4：0-500sccm（range optional)
control precision	About ±1.5%F.S, different ranges, slightly different
Working temperature	5℃-45℃
Plasma radio frequency part
name	RF automatic matcher
Matching power range	0-500W
working frequency	13.56MHZ+0.005%
Normal working reflected power	＜3W
match time	＜3S
transmission efficiency	＞90%
Matching power supply	AC220V/50-60HZ