Main FeaturesAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. The vacuum control units are all assembled in one control box.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Adopt independent evaporation current controller, convenient and fast operation.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. The vacuum chamber is equipped with a KF40 side extraction valve (directly connected to the pre-stage mechanical pump to improve efficiency), a CF150 gate valve (directly connected to the molecular pump), and a KF16 flange (installed resistance gauge) 6. 6 CF35 flanges (1 with ionization gauge, 1 with 2-core electrode, and 1 with thickness gauge) 3 spares.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Equipped with 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. The sample stage is installed on the top of the cavity.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. A high-resolution film thickness gauge can be installed in the cavity, and the resolution (aluminum) of the film thickness measurement is 0.1Å.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Circulating water cooler can be used.AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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SpecificationAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KWAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polishedAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Observation window: Ø100mm, sealed with special sealing ringAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / sAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. Vacuum: 8.0x10-4PaAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Ultimate vacuum 8.0x10-5PaAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. Leakage rate: 6.7 × 10-8Pa · L / SAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9. Sample stage: φ120AevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. The distance between the evaporation boat and the sample table: 150-210mmAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
11. Demand for cooling water: 15L / minAevMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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