Detailed Parameters Of The Product
Product Description:
PT-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
Model
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PT-T1200 CVD with 3 MFC Gas channels |
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Display
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LED
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Max. Temperature
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1200℃ for short time
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Continuous Working Temp.
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≤1100℃
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Heating Rate
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Suggestion: 0~10℃/min
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Temperature Zone
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220mm+220mm+220mm
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Heating Element
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Resistance Wire With Mo
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Thermocouple
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K Type
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Temperature Control Accuracy
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±1℃
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Tube Size
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80x1200mm (OD x L)
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Tube Block
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Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
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Temperature Control
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PID automatic control via SCR power control
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Program and Ramps
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30 steps programmable
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Vacuum Flange
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Stainless Steel vacuum flange with valves

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Power
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220V, 50 Hz, single phase at max.6KW
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Mass Flow Meters
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Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Below photo is 4 MFC for reference. 3 MFC will be with 3 displays

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