Detailed Parameters Of The Product
Product description:9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Product Name Low Vacuum CVD System Model PT-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure.Belongs to a type of CVD System.9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Product parameters:
| Product Name |
Low Vacuum CVD System |
| Model |
PT-T1200-S60-CVD |
| Tube furnace part |
| Furnace structure |
Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃ |
| Furnace Material |
High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field. |
| Max.Temperature |
1200℃ |
| Continuous working temperature |
1100℃ |
| Heating rate |
Recommended ≤10°C/min, the fastest heating rate is 20°C/min |
| Furnace tube material |
High purity quartz tube |
| Furnace tube size |
OD:60mm* ID:54mm * length 1200mm The instrument must be plugged in before use to prevent heat radiation |
| Heating zone length |
220+220+220mm |
| flange |
Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange |
| Temperature Control System |
The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning |
| Heating element |
Molybdenum alloy resistance wire |
| Temperature measuring element |
K type thermocouple |
| Working power |
AC220V,50/60Hz |
| Rated power |
5KW |
| Air inlet and outlet |
The flange contains vacuum connection port, air inlet and outlet |
| Air system part |
| Mass flowmeter |
Four-way precision mass flowmeter: digital display, automatic control of gas flow. MFC1 range: 0-500 sccm (range optional) MFC2 range: 0-500 sccm (range optional) MFC3 range: 0-500 sccm (range optional) MFC4 range: 0-500 sccm (range optional) Gas circuit: 4 channels |
| Vacuum system part |
| vacuum pump |
DRV10 rotary vane pump pumping |
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9z5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac