model:PT-T1600-CVD
Customized CVD System
Application: PT-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.
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Detailed Parameters Of The Product
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac1.Tube Furnace Part:D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere FurnacTechnical Parameter:
| Tube Furnace |
| Max. Temperature |
1600℃ |
| Tube Size |
Φ100mm |
| Heat zone length |
300mm |
| Heating element |
MoSi2 rods |
| Thermo couple |
B Type |
| Display |
LED |
| Tube material |
Alumina |
| Chamber material |
Ceramic fiber |
| Furnace shell material |
Carbon steel |
| Temperature Control |
PID automatic control via SCR power control |
| Heating Rate |
0~20℃/max.(Suggest 0-10℃/min) |
| Temperature control accuracy |
±1℃ |
| Temperature uniformity |
±5℃ |
| Max. Power |
4.0KW |
| Heating curves |
30 steps programmable |
| Working Voltage |
220V, 50HZ (or 380V) |
| Vacuum Flange |
Water cooling flange with valve |
| flowmeter part |
| Five flowmeters |
FFC 1+MFC 1: H2 Gas flow range from 0~500 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 5+MFC 5: Gasification gas:Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac ( Gas flow range according to your requirement) |
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac2.Gas mixer part:D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter :
| Display |
LED |
| Max. Temperature |
1200℃ for short time |
| Continuous Working Temp. |
≤1100℃ |
| Heating Rate |
Suggestion 0~10℃/min(max. 20℃/min) |
| Tube material |
310S |
| Temperature heating zone |
About 200mm(According to design) |
| Diameter |
About OD165mm(According to design) |
| Temperature Control Accuracy |
±1℃ |
| Heating Element |
Resistance wire |
| Thermocouple |
K Type |
| Max. Power |
2.0 KW |
| Working Voltage |
220V, 50HZ (or according to your requirement) |
| Temperature Control |
PID automatic control via SCR power control |
| Heating curves |
30 steps programmable |
| Chamber material |
Alumina Fiber |
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Gasification gas part
Technical Parameter :
| Max Temperature |
1200℃ |
| Crucible diameter |
250mm |
| Crucible depth |
400mm |
| Heating element |
Resistance wire |
| Thermo couple |
K Type |
| Chamber material |
Ceramic fiber |
| Furnace shell material |
Carbon steel |
| Crucible material |
Stainless steel 310S |
| Temperature Control |
PID automatic control |
| Heating Rate |
Max. 0~20℃/min |
| Temperature control accuracy |
±1℃ |
| Temperature uniformity |
±5℃ |
| Max. Power |
4.5KW |
| Working Voltage |
220V, 50HZ (or 380V) |