model:PT-T1600-CVD
Customized CVD System
Application: PT-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.
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Detailed Parameters Of The Product
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac1.Tube Furnace Part:D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere FurnacTechnical Parameter:
Tube Furnace |
Max. Temperature |
1600℃ |
Tube Size |
Φ100mm |
Heat zone length |
300mm |
Heating element |
MoSi2 rods |
Thermo couple |
B Type |
Display |
LED |
Tube material |
Alumina |
Chamber material |
Ceramic fiber |
Furnace shell material |
Carbon steel |
Temperature Control |
PID automatic control via SCR power control |
Heating Rate |
0~20℃/max.(Suggest 0-10℃/min) |
Temperature control accuracy |
±1℃ |
Temperature uniformity |
±5℃ |
Max. Power |
4.0KW |
Heating curves |
30 steps programmable |
Working Voltage |
220V, 50HZ (or 380V) |
Vacuum Flange |
Water cooling flange with valve |
flowmeter part |
Five flowmeters |
FFC 1+MFC 1: H2 Gas flow range from 0~500 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac FFC 5+MFC 5: Gasification gas:Gas flow range from 0~700 sccmD7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac ( Gas flow range according to your requirement) |
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac2.Gas mixer part:D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter :
Display |
LED |
Max. Temperature |
1200℃ for short time |
Continuous Working Temp. |
≤1100℃ |
Heating Rate |
Suggestion 0~10℃/min(max. 20℃/min) |
Tube material |
310S |
Temperature heating zone |
About 200mm(According to design) |
Diameter |
About OD165mm(According to design) |
Temperature Control Accuracy |
±1℃ |
Heating Element |
Resistance wire |
Thermocouple |
K Type |
Max. Power |
2.0 KW |
Working Voltage |
220V, 50HZ (or according to your requirement) |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Chamber material |
Alumina Fiber |
D7dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Gasification gas part
Technical Parameter :
Max Temperature |
1200℃ |
Crucible diameter |
250mm |
Crucible depth |
400mm |
Heating element |
Resistance wire |
Thermo couple |
K Type |
Chamber material |
Ceramic fiber |
Furnace shell material |
Carbon steel |
Crucible material |
Stainless steel 310S |
Temperature Control |
PID automatic control |
Heating Rate |
Max. 0~20℃/min |
Temperature control accuracy |
±1℃ |
Temperature uniformity |
±5℃ |
Max. Power |
4.5KW |
Working Voltage |
220V, 50HZ (or 380V) |